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Electronics/How MEMS Accelerometers & Gyroscopes Work
ElectronicsBeginner7 min

How MEMS Accelerometers & Gyroscopes Work

Microscopic silicon springs, proof masses, and comb-finger capacitors detecting movement and gravity inside your phone.

Interactive Exhibit Visualization

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MEMS DIFFERENTIAL CAPACITIVE SENSOR (DRIE Polysilicon)PROOF MASSDynamic Inertial Shift (F = ma)Fixed Electrode (C1)Fixed Electrode (C2)Balanced: C1 = 120.0 fF | C2 = 120.0 fF (ΔC = 0 fF → 0.00 G)

Step 11. Rest Equilibrium (C1 = C2)

Silicon proof mass is centered between static comb electrodes.

Symmetrical gaps between interdigitated comb teeth yield balanced capacitance across the sensing bridge.

Step 1 of 4How MEMS Accelerometers & Gyroscopes Work
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Target Audience:Curious Beginners
Inside your phone is a microscopic mechanical machine with tiny silicon springs and weights that shift when you move, tilt, or rotate your screen.

Key Takeaways

  • MEMS = Micro-Electro-Mechanical Systems.
  • Contains a microscopic weight (Proof Mass) suspended on silicon springs thinner than a human hair.
  • When you tilt your phone, the weight slides, changing electrical capacitance to auto-rotate your screen.

Microscopic Machines in Silicon

When you turn your phone sideways to watch a video, how does it know gravity shifted?

It doesn't use software magic — inside is a genuine physical machine carved into silicon called a MEMS sensor. It features microscopic suspended weights, flexible springs, and interlocking teeth that move by nanometers when subject to acceleration or rotation.
Interactive Challenge+25 XP

How does a smartphone MEMS gyroscope measure rotation without having any spinning mechanical wheels inside?